Dr. Bin Fan Profile

Dr. Bin Fan

at Institute of Optics and Electronics CAS

SPIE Involvement:

Author | Editor

Publications (43)

Proceedings Article | 11 October 2024 Paper

Fast convergence of shapes using atmospheric inductively coupled plasma

Peiqi Jiao, Bin Fan, Qiang Xin, Xiang Wu, Yujuan Zhang, Hong Wang

Proceedings Volume 13278, 132780B (2024) https://doi.org/10.1117/12.3032179

KEYWORDS: Plasma, Atmospheric plasma, Etching, Optics manufacturing, Atmospheric optics, Optical surfaces

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Proceedings Article | 19 February 2024 Paper

Polarization fusion algorithm based on NSCT decomposition and improved dual-channel PCNN model

Chao Hu, Bin Fan, Jiang Bian, Shuo Zhong, Lun Wang, Mengxia Hou, Bo Qi

Proceedings Volume 13063, 130632I (2024) https://doi.org/10.1117/12.3021457

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Proceedings Article | 9 January 2023 Paper

Study on radial uniformity of large aperture capacitively coupled plasma

Xiang Wu, Bin Fan, Peiqi Jiao, Qiang Xin, Zhaoyu Liang

Proceedings Volume 12507, 125070A (2023) https://doi.org/10.1117/12.2653311

KEYWORDS: Plasma, Electrodes, Modulation, Ionization, Helium, Etching, Reactive ion etching, Plasma etching, Numerical simulations

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SPIE Journal Paper | 29 December 2022

Cophasing detection of the segmented diffractive optical elements with the phase diversity method

Chencheng Li, Fengtao Yan, Bin Fan

OE, Vol. 61, Issue 12, 123105, (December 2022) https://doi.org/10.1117/12.10.1117/1.OE.61.12.123105

KEYWORDS: Diffractive optical elements, Mirrors, Telescopes, Image segmentation, Phase shifts, Particle swarm optimization, Fluctuations and noise, Point spread functions, Imaging systems, Particles

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SPIE Journal Paper | 29 March 2022

Three orientations method for extracting zero-gravity surface figure of a mirror

Jia Zhai, Yutong Meng, Xiaoli Ren, Fengtao Yan, Bin Fan

JATIS, Vol. 8, Issue 01, 014011, (March 2022) https://doi.org/10.1117/12.10.1117/1.JATIS.8.1.014011

KEYWORDS: Mirrors, Atomic force microscopy, Error analysis, Space mirrors, Data modeling, Optical components, Interferometers, Mathematical modeling, Zernike polynomials, Space operations

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Proceedings Article | 5 November 2020 Paper

Reactive ion figuring of large optical membrane components

Zhiwei Li, Junming Shao, Qian Luo, Bin Fan, Baiping Lei, Guohan Gao, Jiang Bian, Shibin Wu, Junfeng Du

Proceedings Volume 11568, 115680Z (2020) https://doi.org/10.1117/12.2579498

KEYWORDS: Photomasks, Photoresist materials, Ions, Surface roughness, Reactive ion etching, Phase measurement, Optical lithography, Optical fabrication

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Proceedings Article | 30 January 2019 Paper

Gas flow simulation research on reaction chamber of reactive ion etching

Jingwen Zhang, Fan Bin, Zhiwei Li, Xin Liu, Bincheng Li, Han Yu, Gong Chang

Proceedings Volume 10841, 108410G (2019) https://doi.org/10.1117/12.2512222

KEYWORDS: Reactive ion etching, Electrodes, Etching, 3D modeling, Plasma, Electronics, Plasma etching, Manufacturing, Protactinium, Lithium

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SPIE Journal Paper | 30 January 2019

Fabrication of micropyramid structure by fly-cutting

Yuetian Huang, Shijie Li, Bin Fan, Yongjian Wan, Shibin Wu, Jin Zhang, Haifeng Liang, Shaobo Ge

OE, Vol. 58, Issue 01, 013107, (January 2019) https://doi.org/10.1117/12.10.1117/1.OE.58.1.013107

KEYWORDS: Optical fabrication, 3D microstructuring, Optical engineering, Fluctuations and noise, Scanning electron microscopy, Photography, Lithium, Germanium, Error analysis, Array processing

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Proceedings Article | 24 January 2019 Paper

The research of single point diamond turning Fresnel lens technology

Yuetian Huang, Bin Fan, Yongjian Wan, Shijie Li

Proceedings Volume 10840, 1084010 (2019) https://doi.org/10.1117/12.2504753

KEYWORDS: Fresnel lenses, Nose, Surface roughness, Diamond, Single point diamond turning, Aluminum, Copper, Metals, Manufacturing, Materials processing

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Proceedings Article | 11 January 2019 Paper

Optical design of diffractive telescope system based on off-axis three mirror

Chuanwang He, Peng Huang, Xiaochun Dong, Bin Fan

Proceedings Volume 10837, 108370K (2019) https://doi.org/10.1117/12.2505811

KEYWORDS: Telescopes, Mirrors, Space telescopes, Imaging systems, Off axis mirrors, Optical design, James Webb Space Telescope, Diffraction, Optical imaging, Binary data

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SPIE Journal Paper | 26 February 2018 Open Access

Stray light characteristics of the diffractive telescope system

Dun Liu, Lihua Wang, Wei Yang, Shibin Wu, Bin Fan, Fan Wu

OE, Vol. 57, Issue 02, 025105, (February 2018) https://doi.org/10.1117/12.10.1117/1.OE.57.2.025105

KEYWORDS: Stray light, Telescopes, Space telescopes, Prototyping, Diffraction, Diffractive optical elements, Stars, Sensors, Fluctuations and noise, Transmittance

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Proceedings Article | 2 January 2018 Paper

Opto-mechanical design and development of a 460mm diffractive transmissive telescope

Bo Qi, Lihua Wang, Zhangang Cui, Jiang Bian, Sihua Xiang, Haotong Ma, Bin Fan

Proceedings Volume 10456, 104565I (2018) https://doi.org/10.1117/12.2282748

KEYWORDS: Telescopes, Space telescopes, Optomechanical design, Optical instrument design

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Proceedings Article | 16 October 2017 Paper

High precision processing CaF2 application research based on the magnetorheological finishing technology

Xianyun Zhong, Bin Fan, Fan Wu

Proceedings Volume 10448, 104481Y (2017) https://doi.org/10.1117/12.2279477

KEYWORDS: Magnetorheological finishing, Surface finishing, Polishing, Single point diamond turning, Deep ultraviolet, Aspheric lenses, Lithography, Precision processing technology, Mirrors, UV optics

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SPIE Journal Paper | 29 August 2017

High-accuracy process based on the corrective calibration of removal function in the magnetorheological finishing

Xianyun Zhong, Bin Fan, Fan Wu

OE, Vol. 56, Issue 08, 084109, (August 2017) https://doi.org/10.1117/12.10.1117/1.OE.56.8.084109

KEYWORDS: Magnetorheological finishing, Polishing, Calibration, Surface finishing, Error analysis, Optical spheres, Mirrors, Fluctuations and noise, Silica, Photovoltaics

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Proceedings Article | 24 October 2016 Paper

Analysis of surface error correction capability of 1.2m active support system

Yu Han, Bin Fan, Chaoqiang Li, Haitao Liu

Proceedings Volume 9682, 96820Q (2016) https://doi.org/10.1117/12.2243755

KEYWORDS: Error analysis, Active optics, Mirrors, Actuators, Zernike polynomials, Control systems, Computer simulations, Calibration, Telescopes, Fluctuations and noise

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Proceedings Article | 27 September 2016 Paper

Alignment and measurement for back-end optical system of quantum communication

Qi-rui Xu, Bin Fan

Proceedings Volume 9684, 96841G (2016) https://doi.org/10.1117/12.2242142

KEYWORDS: Optical alignment, Quantum communications, Optical testing, Polarization, Single photon detectors, Quantum efficiency, Integrated optics, Collimators, Sensors, Beam analyzers

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Proceedings Article | 27 September 2016 Paper

The method to reduce the spinal error in the aspheric mirror testing with the CGH

Fengtao Yan, Bin Fan, Xi Hou, Fan Wu, Baiping Lei, Haitao Liu, Hongshen Zhao

Proceedings Volume 9684, 968424 (2016) https://doi.org/10.1117/12.2243805

KEYWORDS: Computer generated holography, Optical testing, Aspheric optics, Mirrors, Aspheric lenses, Diffraction, Fringe analysis, Wavefronts, Optical spheres, Interferometers

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Proceedings Article | 17 July 2015 Paper

Experimental study on the measurement of convex hyperbolic mirrors with Hindle and stitching methods

Fengtao Yan, Bin Fan, Xi Hou, Fan Wu, Baiping Lei

Proceedings Volume 9524, 95240A (2015) https://doi.org/10.1117/12.2185697

KEYWORDS: Mirrors, Optical spheres, Interferometers, Testing and analysis, Telescopes, Aspheric lenses, Aspheric optics, Monochromatic aberrations, Metrology, Electronics

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Proceedings Article | 17 July 2015 Paper

Design and simulation of the active support system for a 1.2m meniscus primary mirror

Haitao Liu, Bin Fan, Zhige Zeng, Xiaojin Li, Hongqiao Wang, Rong Liu

Proceedings Volume 9524, 95240R (2015) https://doi.org/10.1117/12.2187042

KEYWORDS: Mirrors, Actuators, Finite element methods, Active optics, Monochromatic aberrations, Telescopes, Control systems design, Connectors, Polishing, Digital signal processing

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Proceedings Article | 18 September 2014 Paper

High accurate subaperture testing

Fengtao Yan, Bin Fan, Xi Hou, Fan Wu, Baiping Lei

Proceedings Volume 9282, 92822H (2014) https://doi.org/10.1117/12.2068161

KEYWORDS: Mirrors, Interferometers, Zernike polynomials, Calibration, Photovoltaics, Testing and analysis, Data processing, Optical testing, Optical spheres, Fluctuations and noise

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Proceedings Article | 2 September 2014 Paper

Improvement of active lap processing in grinding of 1.8m primary mirror

Haitao Liu, Fan Wu, Zhige Zeng, Bin Fan, Yongjian Wan, Yong Zhang, Linhan Xian

Proceedings Volume 9280, 92800Z (2014) https://doi.org/10.1117/12.2068096

KEYWORDS: Mirrors, Finite element methods, Photovoltaics, Polishing, Data modeling, Surface finishing, Ions, Neodymium, Fluctuations and noise, Electronics

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Proceedings Article | 2 September 2014 Paper

Disassembling and reintegration of large telescope primary mirror

Qi-rui Xu, Bin Fan, Ming Zhang

Proceedings Volume 9280, 92800D (2014) https://doi.org/10.1117/12.2068583

KEYWORDS: Mirrors, Telescopes, Astronomical telescopes, Large telescopes, Astronomy, Coating, Reflectivity, Optical alignment, Fluctuations and noise, Reflector telescopes

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Proceedings Article | 2 September 2014 Paper

A new method on measuring radius of curvature of a conic aspherical mirror

Chuan-ke Huang, Yong-qian Wu, Bin Fan, Feng-tao Yan, Feng-wei Liu, Yong-hong Zhang

Proceedings Volume 9280, 928017 (2014) https://doi.org/10.1117/12.2070637

KEYWORDS: Aspheric lenses, Mirrors, Interferometers, Optical spheres, Wavefronts, Optical testing, Spherical lenses, Distance measurement, Laser processing, Interferometry

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Proceedings Article | 6 August 2014 Paper

Research on the design of surface acquisition system of active lap based on FPGA and FX2LP

Hongshen Zhao, Xiaojin Li, Bin Fan, Zhige Zeng

Proceedings Volume 9281, 92812T (2014) https://doi.org/10.1117/12.2071189

KEYWORDS: Field programmable gate arrays, Sensors, Data acquisition, Computer programming, Telecommunications, Control systems, Mirrors, Signal processing, Human-machine interfaces, Surface finishing

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Proceedings Article | 6 August 2014 Paper

Evaluate error correction ability of magnetorheological finishing by smoothing spectral function

Jia Wang, Bin Fan, Yongjian Wan, Chunyan Shi, Bin Zhuo

Proceedings Volume 9281, 928115 (2014) https://doi.org/10.1117/12.2070675

KEYWORDS: Polishing, Surface finishing, Magnetorheological finishing, Spatial frequencies, Mirrors, Photovoltaics, Silicon, Optics manufacturing, Convolution, Subaperture finishing

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Proceedings Article | 6 August 2014 Paper

A path planning method used in fluid jet polishing eliminating lightweight mirror imprinting effect

Wenzong Li, Bin Fan, Chunyan Shi, Jia Wang, Bin Zhuo

Proceedings Volume 9281, 92811H (2014) https://doi.org/10.1117/12.2070967

KEYWORDS: Polishing, Lightweight mirrors, Surface finishing, Optical design, Photovoltaics, Error analysis, Lithium, Manufacturing, Head, Aerospace engineering

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Proceedings Article | 6 August 2014 Paper

The thin mirror deformation and stress distribution analysis based on different influence functions

Hongqiao Wang, Bin Fan, Yongqian Wu, Haitao Liu, Rong Liu

Proceedings Volume 9281, 92811W (2014) https://doi.org/10.1117/12.2069101

KEYWORDS: Mirrors, Photovoltaics, Active optics, Monochromatic aberrations, Fabrication, Polishing, Lithium, Telescopes, Electronics, Shape analysis

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SPIE Journal Paper | 25 July 2014

Method to calculate the error correction ability of tool influence function in certain polishing conditions

Jia Wang, Bin Fan, Yongjian Wan, Chunyan Shi, Bin Zhuo

OE, Vol. 53, Issue 07, 075106, (July 2014) https://doi.org/10.1117/12.10.1117/1.OE.53.7.075106

KEYWORDS: Polishing, Surface finishing, Spatial frequencies, Error analysis, Mirrors, Optics manufacturing, Zerodur, Mathematical modeling, Convolution, Data modeling

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SPIE Journal Paper | 9 August 2013

Absolute subaperture testing by multiangle averaging and Zernike polynomial fitting method

Fengtao Yan, Bin Fan, Xi Hou, Fan Wu

OE, Vol. 52, Issue 08, 085101, (August 2013) https://doi.org/10.1117/12.10.1117/1.OE.52.8.085101

KEYWORDS: Interferometers, Mirrors, Zernike polynomials, Calibration, Photovoltaics, Optical spheres, Distortion, Fluctuations and noise, Optical engineering, Spatial resolution

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Proceedings Article | 13 May 2013 Paper

Design and experiment of testing an off-axis aspheric surface by computer generated hologram

Shijie Li, Fan Wu, Qiang Chen, Bin Fan, Lianghong Li

Proceedings Volume 8788, 878833 (2013) https://doi.org/10.1117/12.2019345

KEYWORDS: Computer generated holography, Aspheric lenses, Holograms, Optical alignment, Optical design, Interferometers, Autocollimation, Diffraction, Optical fabrication, Wavefronts

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Proceedings Article | 16 October 2012 Paper

Reconstructing in laser wavelength scanning interference test of aspheric surface

Lulu Li, Wenchuan Zhao, Xianyu Su, Fan Wu, Bin Fan

Proceedings Volume 8416, 841625 (2012) https://doi.org/10.1117/12.2009280

KEYWORDS: Aspheric lenses, Mirrors, Aspheric optics, Optical spheres, Wavefronts, Zernike polynomials, Reconstruction algorithms, Optical testing, Interferometers, Electronics

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Proceedings Article | 16 October 2012 Paper

Machining simulation of off-axis parabolic hexagonal mirrors

Xiao Feng, Bin Fan

Proceedings Volume 8416, 84161X (2012) https://doi.org/10.1117/12.974258

KEYWORDS: Mirrors, Optical spheres, Aspheric lenses, Off axis mirrors, Mathematical modeling, Optics manufacturing, Convolution, 3D modeling, Aspheric optics, Polishing

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Proceedings Article | 16 October 2012 Paper

Elimination of the imprinting effect of the lightweight aspheric polished by CCAL technology using immersed inflation

Xianyun Zhong, Qinglan Xu, Bin Fan, Jiabin Zhou

Proceedings Volume 8416, 841629 (2012) https://doi.org/10.1117/12.975957

KEYWORDS: Polishing, Mirrors, Surface finishing, Lightweight mirrors, Aspheric lenses, Finite element methods, Image quality, Error analysis, Optical components, Silica

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Proceedings Article | 16 October 2012 Paper

Mathematical model for active lap to achieve unsymmetrical fabrication

Haitao Liu, Zhige Zeng, Fan Wu, Bin Fan

Proceedings Volume 8416, 841622 (2012) https://doi.org/10.1117/12.975689

KEYWORDS: Mirrors, Mathematical modeling, Surface finishing, Aspheric lenses, Polishing, Off axis mirrors, Control systems, Mirror pointing, Manufacturing, Monochromatic aberrations

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Proceedings Article | 15 October 2012 Paper

Measurement of an off-axis parabolic mirror using coordinates measurement machine and swing arm profilometer during the grinding process

Hongwei Jing, Changqing Lin, Bin Fan, Long Kuang, Shibin Wu, Fan Wu, Tianquan Fan

Proceedings Volume 8415, 84150K (2012) https://doi.org/10.1117/12.976811

KEYWORDS: Photovoltaics, Mirrors, Off axis mirrors, Profilometers, Interferometry, Prototyping, Polishing, Optical testing, Fluctuations and noise, Electronics

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Proceedings Article | 15 October 2012 Paper

A novel method for calibrating the image distortion of the interferometer

Fengtao Yan, Bin Fan, Xi Hou, Fan Wu

Proceedings Volume 8415, 841516 (2012) https://doi.org/10.1117/12.975758

KEYWORDS: Distortion, Interferometers, Calibration, Mirrors, Imaging systems, Optics manufacturing, Cameras, Data centers, Polishing, Optical testing

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Proceedings Article | 15 October 2012 Paper

Dwell time calculation for computer controlled large tool

Bin Fan, James Burge, Hubert Martin, Zhige Zeng, Xiaojin Li, Jiabin Zhou

Proceedings Volume 8415, 84150A (2012) https://doi.org/10.1117/12.978651

KEYWORDS: Mirrors, Computer simulations, Optics manufacturing, Active optics, Polishing, Observatories, Electronics, Electroluminescence, Fluctuations and noise, Abrasives

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Proceedings Article | 14 October 2010 Paper

Grinding and polishing technology by computer controlled active lap for Φ1250mmF/1.5 aspheric mirror

Bin Fan, Zhige Zeng, Xiaojin Li, Qiang Chen, Pingqi Gao, Jiabin Zhou, Yongjian Wan

Proceedings Volume 7654, 765409 (2010) https://doi.org/10.1117/12.883418

KEYWORDS: Mirrors, Polishing, Surface finishing, Optics manufacturing, Active optics, Photovoltaics, Manufacturing, Lens design, Aspheric optics, Aspheric lenses

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Proceedings Article | 23 July 2008 Paper

Testing large aspheric surfaces with complementary annular subaperture interferometric method

Xi Hou, Fan Wu, Baiping Lei, Bin Fan, Qiang Chen

Proceedings Volume 7018, 70183K (2008) https://doi.org/10.1117/12.786398

KEYWORDS: Aspheric lenses, Interferometry, Reconstruction algorithms, Mirrors, Aspheric optics, Wavefronts, Zernike polynomials, Monochromatic aberrations, Spherical lenses, Optical spheres

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Proceedings Article | 17 January 2008 Paper

Measurement of optical surfaces with knife edge method

Hongwei Jing, Bin Fan, Shibin Wu, Fan Wu, Tianquan Fan

Proceedings Volume 6723, 67235L (2008) https://doi.org/10.1117/12.783786

KEYWORDS: Mirrors, Optical testing, Distance measurement, Oxygen, Charge-coupled devices, Photovoltaics, Mathematics, Spherical lenses, Error analysis, Computing systems

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Proceedings Article | 27 November 2007 Paper

Method for removing temperature shifting during measurement of large mirrors in grinding process

Hongwei Jing, Long Kuang, Bin Fan

Proceedings Volume 6723, 67235K (2007) https://doi.org/10.1117/12.783785

KEYWORDS: Temperature metrology, Mirrors, Optics manufacturing, Mirror pointing, Spherical lenses, Molybdenum, Time metrology, Optical testing, Photovoltaics, Electronics

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Proceedings Article | 10 February 2005 Paper

The intelligent controlling of active lap based on CMAC neural network

Bin Fan, Li Yang, Zhige Zeng, Fan Wu, Shibin Wu, Yongjian Wan

Proceedings Volume 5638, (2005) https://doi.org/10.1117/12.574706

KEYWORDS: Neural networks, Control systems, Zernike polynomials, Surface finishing, Mirrors, Complex systems, Aspheric lenses, Sensors, Optics manufacturing, Active optics

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Proceedings Article | 10 February 2005 Paper

A new model with the active-lap

Yongjian Wan, Jiahu Yuan, Li Yang, Bin Fan, Yao Zhen, Zhige Zeng

Proceedings Volume 5638, (2005) https://doi.org/10.1117/12.576091

KEYWORDS: Mirrors, Fuzzy logic, Algorithm development, Control systems, Aspheric lenses, Computer simulations, Active optics, Optics manufacturing, Surface finishing, Abrasives

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