Mr. Xin Liu Profile

Xin Liu

at Institute of Optics and Electronics CAS

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Publications (3)

Proceedings Article | 30 January 2019 Paper

Gas flow simulation research on reaction chamber of reactive ion etching

Jingwen Zhang, Fan Bin, Zhiwei Li, Xin Liu, Bincheng Li, Han Yu, Gong Chang

Proceedings Volume 10841, 108410G (2019) https://doi.org/10.1117/12.2512222

KEYWORDS: Reactive ion etching, Electrodes, Etching, 3D modeling, Plasma, Electronics, Plasma etching, Manufacturing, Protactinium, Lithium

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Proceedings Article | 28 October 2016 Paper

High-precision structure fabrication based on an etching resistance layer

Man Zhang, Qiling Deng, Lifang Shi, Axiu Cao, Hui Pang, Xin Liu, Jiazhou Wang, Song Hu

Proceedings Volume 9683, 96830C (2016) https://doi.org/10.1117/12.2245685

KEYWORDS: Etching, Resistance, Optical lithography, Quartz, Electron beam lithography, Fabrication, Ions, Diffractive optical elements, Lithography, Nanolithography

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Proceedings Article | 25 October 2016 Paper

A new flexible hybrid mask for contact exposure and its fabrication

Xin Liu, Man Zhang, A-xiu Cao, Hui Pang, Jia-zhou Wang, Qi-ling Deng

Proceedings Volume 9685, 96850Q (2016) https://doi.org/10.1117/12.2245719

KEYWORDS: Printing, Polymers, Photomasks, Photoresist materials, Metals, Aluminum, Positron emission tomography, Particles, Lithography, Distortion

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