Dr. Xiang Wu
at Chinese Academy of Sciences
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 11 October 2024 Paper
Proceedings Volume 13278, 132780B (2024) https://doi.org/10.1117/12.3032179
KEYWORDS: Plasma, Atmospheric plasma, Etching, Optics manufacturing, Atmospheric optics, Optical surfaces

Proceedings Article | 9 January 2023 Paper
Proceedings Volume 12507, 125070A (2023) https://doi.org/10.1117/12.2653311
KEYWORDS: Plasma, Electrodes, Modulation, Ionization, Helium, Etching, Reactive ion etching, Plasma etching, Numerical simulations

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