Mr. Abdelrahman Toraya Profile

Abdelrahman Toraya

at Zewail City of Science and Technology

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Publications (2)

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Proceedings Article | 2 March 2022 Poster + Paper

Tri-axial optical MEMS accelerometer enables monolithic fabrication

Samir AboZyd, Abdelrahman Toraya, Noha Gaber

Proceedings Volume 12013, 120130K (2022) https://doi.org/10.1117/12.2607744

KEYWORDS: Sensors, Microelectromechanical systems, Optical fabrication, Light emitting diodes, Digital signal processing, Photodetectors, Optics manufacturing, Microopto electromechanical systems, 3D metrology, Silicon

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Accelerometers are one of the most widely used sensors. They are essential in many applications such as inertial measurement units (IMUs), airbags safety systems, activity monitoring in biomedical applications, and vibration analysis of industrial machinery. Some of these applications may need high immunity to Electromagnetic Interference (EMI). Optical accelerometers can provide such an advantage and usually shows better sensitivity. However, most of the previous versions involved optical fibers, which hindered their monolithic microfabrication. The few optical accelerometers suited for mass production presented previously in literature suffered from some other drawbacks, besides measuring in one direction (1D) only. In this work, we present a novel optical accelerometer that enables measurements in 3D, besides facilitating monolithic fabrication and simple assembly. The operation principle is based on power modulation technique that does not need complicated processing and achieves real-time measurements. The device consists of a light-emitting diode (LED), a quadrant photodetector and a proof mass suspended between them by springs allowing it to move along the 3-axes. When the proof mass moves due to the applied acceleration, more light will pass to some panels of the quadrant detector while others will receive less light, according to the motion direction. The sensor design, implementation scheme, mechanical simulation and optical modeling are reported. COMSOL finite element analysis (FEA) simulation shows a mechanical sensitivity exceeding 3.7µm/G. The modeling for both mechanical, optical and electrical transductions shows a total sensitivity up to 100 µA/G. The mechanical part of the device is fabricated using the SOIMUMPs process.

Proceedings Article | 5 March 2021 Poster + Presentation + Paper

On-chip structure for optofluidic sensing using stable Fabry-Pérot resonator

Abdelrahman Toraya, Noha Gaber, Frédéric Marty, Tarik Bourouina

Proceedings Volume 11697, 1169717 (2021) https://doi.org/10.1117/12.2582696

KEYWORDS: Mirrors, Resonators, Structural sensing, Optofluidics, Space mirrors, Wavefronts, Structural design, Silicon, Sensors, Optical resonators

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Miniaturizing optical resonators on-chip offers employing them in lab-on-chip sensing devices, which achieves portability, lower price, and only finger prick sample sizes. However, the chip microfabrication limitation may impose some challenges. Taking the Fabry-Pérot cavity, the mirrors ideally should have curved shape in 3D to match the lightbeam wave front to achieve good light confinement inside the resonator. But as 3D curvature is challenging to fabricate on-chip, straight mirrors are usually used instead with short cavity lengths to avoid high diffraction loss with the beams’ multiple trips between the 2 mirrors. The short length limits the sample space between the mirrors, so it can’t accommodate large samples such as some types of biological cells. In previous work, the curvature is divided on 2 plans by using cylindrical mirrors for the horizontal plan confinement, and a fiber-rod-lens for the vertical plan confinement. That scheme achieved good light stability; but the curved mirrors produced side peaks as higher order resonance modes, which put limitation on the sensor range. In this work, a novel design is introduced to overcome this limitation by using straight mirrors instead of curved ones, and use an upright cylindrical lens to confine the light in the transverse direction before the cavity. The novel structure is designed by analytical modeling, and verified by numerical simulations. The cavity lengths are typically of tens of micrometers and can reach hundreds, allowing the fluidic channel to hold large test samples. The chip is fabricated in silicon, then fiber-rod-lenses are simply added post-fabrication.

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