Dr. Agnes Roussy Profile

Dr. Agnes Roussy

at École des Mines de Saint-Étienne

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Publications (1)

Proceedings Article | 4 September 2018 Paper

The light behavior from Shallow Trench Isolation profiles at Chemical Mechanical Planarization step and correlation with optical endpoint system by interferometry

S. Bourzgui, G. Georges, A. Roussy, J. Blue, E. Faivre, J. Pinaton

Proceedings Volume 10750, 107500C (2018) https://doi.org/10.1117/12.2320966

KEYWORDS: Chemical mechanical planarization, Polishing, Interferometry, Diffraction, Semiconducting wafers, Signal detection, Process control, Light scattering, Scattering

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