Andrea Corno
at STMicroelectronics SRL
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 20 March 2020 Paper
A. Corno, A. Bordogna, M. Braga, A. Pescalli, F. Ferrario, U. Iessi, P. Canestrari, P. Sharma, M. Salamone, P. Parisi, T. Groos
Proceedings Volume 11325, 113252K (2020) https://doi.org/10.1117/12.2551884
KEYWORDS: Inspection, Manufacturing, Optical lithography, Process control

Proceedings Article | 20 March 2020 Paper
A. Bordogna, S. Seminato, A. Corno, A. Beccalli, L. Motta, G. Pistone, F. Ferrario, P. Piacentini, B. Micali, P. Sharma, L. Bouckou, P. Parisi, T. Groos
Proceedings Volume 11325, 113250I (2020) https://doi.org/10.1117/12.2551890
KEYWORDS: Inspection, Lithography, Defect detection, Defect inspection, Manufacturing, Process control

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