Highly sensitive trace-gas sensors are required in a large range of applications, such as biological, environmental, industrial, and fundamental physics. Photoacoustic spectroscopy has the advantages of compactness and robustness and is characterized by a high degree of flexibility in its configuration, in particular in the selection of the laser source and the transducer. Here we report the experimental characterization of new silicon-based Micro electro-mechanical systems (MEMS) structures to be applied as acoustic-to-voltage transducers in a photo-acoustic-based sensor. In our setup, a 4.5 μm continuous wave quantum cascade laser is used to address strong N2O roto-vibrational transition, and the detection of MEMS oscillations is performed via a balanced interferometric readout.
We report on the development of Quartz-Enhanced Photoacoustic Spectroscopy (QEPAS) technology to detect 8 different air pollutants, namely CH4, NO2, CO2, N2O, CO, NO, SO2 and NH3, with the same acoustic detection module and interchangeable laser sources, to prove the modularity of the technique as well as the adaptability to different lasers. For each gas species, the fine structure of the infrared absorption bands has been simulated by using HITRAN database. Each gas species was detected with an ultimate detection limit well below their typical natural abundance in air even with signal integration time as low as 0.1 s.
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