Various methods of hybrid integration of photonic circuits are discussed focusing on merits and challenges. Material platforms discussed in this report are mainly polymer and silica. We categorize the hybridization methods using silica and polymer waveguides into two types, chip-to-chip and on-chip integration. General reviews of these hybridization technologies from the past works are reviewed. An example for each method is discussed in details. We also discuss current status of our silica PLC hybrid integration technology.
We report on our efforts to integrate silica and polymer waveguide devices, such as arrayed waveguide gratings
(AWG's), tunable lenses, optical switches, variable optical attenuators (VOA's), power taps. In particular, the
realizations of various optical add/drop multiplexers and tunable dispersion compensators are discussed. The integration
techniques, the design architectures and the corresponding optical performances are presented.
A novel method of measuring absolute position using broad band laser interferometry is presented. The interferometer has been designed and implemented as the metric for a real-time stage focus micro-lithography application. Highlights of the metric are high precision (less than 100 nm) and wide range (300 microns).
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