A novel method based on a grating mode multi-reflection model for designing guided mode resonance gratings under TM polarized incidence is proposed. An effect of near-zero effective refractive index of grating mode is presented. Considering this effect, the design process can be simplified. An example of GMR Brewster grating is designed to verify the design method and a rigorous numerical simulation of the example is given which shows that the design goal is well achieved.
As an important means to obtain three-dimensional depth information of target, optical measurement has been widely used in face recognition, machine manufacturing, aerospace and other related fields in the past decades. Optical three-dimensional imaging and depth measurement is a fast and non-contact method for reconstructing three-dimensional imaging and depth measurement of objects based on optical means and digital image processing analysis. In this paper, a three-dimensional measurement module of transversely rotating combined Dammann grating is proposed, which generates interleaved high-density dot-matrix structured light for three-dimensional imaging and measurement. The measurement module consists of integrated components of laser and beam expander, collimating lens, four transversely rotating combined Dammann gratings with different beam splitting ratios, and objective lens. The laser emits a laser beam which is collimated by a collimating lens. Four Dammann gratings are used to generate four non-staggered dot-matrix by splitting them, and then the high-density staggered projection dot-matrix for three-dimensional measurement and imaging are projected by the objective lens. The measurement module has the advantages of simple structure, high output dot-matrix density, staggered projection dot-matrix edges, and easy integration into mobile devices. This technology may reduce the complexity, number of optical elements, power consumption and cost of structured light projectors in mobile and fixed 3D sensors.
A 1×5 transmission grating splitter with triangular structure under normal incidence at the wavelength of 1550 nm is presented in this paper. In order to further increase the efficiency, the material of the designed grating is MgF2. The whole transmitted diffraction efficiency of the gratings is over 99% with uniformity better than 0.3%. The designed parameters of this triangular grating are employed by the rigorous coupled-wave analysis and the simulated annealing algorithm. This grating has a large tolerance for fabrication with better performance, which should be highly interesting for practical applications.
In this paper, we propose a two-dimensional metal-dielectric grating with dielectric nanodisks on a thin gold film structure for refractive index sensing due to its near unity absorption at 1050 nm wavelength. The perfect absorption mainly originates from excitation of the horizontal magnetic dipole mode in the metal-dielectric structure. The results show that the sensitivity and full width half maximum are 560 nm/RIU and 11.13 nm over the sensing range of 1.33 to 1.38, respectively. Obviously, the corresponding figure of merit is calculated to be 50.3 RIU-1, which shows a high sensing performance. Moreover, it also shows excellent performance by measuring the light intensity change in the reflected light at a certain wavelength. The proposed structure has great potential application in biological sensing, integrated photodetectors, chemical applications and so on.
Spectrum plays an essential role in spectral imaging technology. To obtain the spectral information of image, two high - density diffraction gratings which substitute the prism are introduced in the Sagnac loop to form the polarization Sagnac interferometer (PSI). Usually, it’s difficult for prism to achieve wider angle of spectral line and higher resolution, the presented Sagnac loop with high-density gratings has advantages of wide spectral and high resolution. Meanwhile, the dispersion generated by grating is more uniformed than the prism. The two parallel beams exit from the Sagnac loop and the pass through the linear polarizer and finally polymerized on the focal plane array (FPA) by an imaging lens. This compact Sagnac loop with two high-density diffraction gratings is a new way to obtain the spectral-resolved image, which should be interesting for practical applications.
A single-groove grating for four-port TE-polarization beam splitting under normal incidence at the wavelength of 632.8nm is presented. The total efficiency of the beam splitter is over 77% with beam split uniformity better than 5%. Rigorous coupled-wave analysis (RCWA) and the simulated annealing (SA) algorithm are employed to design this beam splitter grating. The tolerance of fabrication errors of the grating is analyzed.
With the release of IphoneX, compact 3D optical measurement has become a popular technology. An important application of compact 3D optical measurement is to realize 3D imaging of targets. A compact three-dimensional optical measuring instrument can project a coded or structured light pattern onto an object to achieve the purpose of three-dimensional imaging. Apple's solution is to design diffractive optical elements using algorithms (such as the Gerchberg-Saxton algorithm) to produce a fan-out staggered dot matrix projection pattern in which some dot matrix produce a lateral offset from adjacent dot matrix. In this paper, a new method is proposed to generate the interlaced lattice projection pattern, i. e. the transverse odd-even combinational Dammann grating method. This method produces the above pattern by two Dammann gratings placed perpendicular to the optical axis, which is different from the scheme proposed by Apple. The advantage of this scheme is that the overal structure is simple and the design cost is reduced, so it is easy to mass-produce, and its lateral combinational structure is conducive to the miniaturization and integration of devices, so it is convenient to integrate in various interconnected devices. For example, mobile phones with 3D face recognition using this technology are not only easy to use, but also highly secure.
Grating theory is normally designed for nano/microoptics applications. If we consider the further smaller size, we might enter the area of picometer optics. Although it seems picometer optics might be the frontier of developing nanooptics devices into the next step, it is hard to make picometer optical devices previously. We will report a series of three works that can lead us into the picometer scale. The first is to fabricate high-density gratings whose periods can be controlled to be slightly different in picometer range, which is done by rotating Dammann grating in a microrad angle for achieving the grating period continuously tuned in picometer scale. The second is to propose carrier pico-grating array for measuring the distances of the moving grating, which can be done in picometer accuracy. The third is to measure the wavefront of two-beam interferences in picometer accuracy, which is far beyond the current normal laser interferometer. Initial experimental results demonstrated that the wavefront has been measured with 250pm linear phase difference, which is impossible to obtain with the traditional laser interferometer. Taking consideration of these picometer works together, we believe that picometer optics should come with these picometer optical tools further extended in the near future.
The direct laser writing lithography technology is an efficient way to make the large-sized diffraction gratings. It has the advantages of high efficiency, low cost and high flexibility. For further improvement the performance of the direct laser writing technology, we introduced the two-dimensional Dammann grating into the direct laser writing system. The Dammann grating can create a finite array of uniform intensity spots so that the efficiency of the writing can be increased. In addition, we also proposed a way of rotating the two-dimensional Dammann grating. By the geometric relationship, the expressions of the rotation angle can be derived. Considering the efficiency, the uniformity and the price of the 1D Dammann, we proposed the rotating 2D Dammann grating technology based on the 1D Dammann grating. While the rotation angles of 1D Dammann grating and the 2D Dammann grating are different. The efficiency of laser writing based on 2D Dammann is quite higher than the 1D-Dammann laser writing. We can use this method to fabricate the large-sized diffraction gratings efficiently.
Displacement laser interferometers and grating interferometers are two main apparatus for the micron-nanometer displacement measurement over a long range. However, the laser interferometers, whose measuring scale is based on the wavelength, are very sensitive to the environment. On the contrast, the grating interferometers change the measuring scale from wavelength to grating period, which is much stable for the measurement results. But the resolution of grating interferometer is usually lower than that of laser interferometer. Therefore, further investigation is needed to improve the performance of grating interferometer. As we known, the optical subdivision is a main factor that affects the measurement resolution. In this paper, a grating interferometer with high optical subdivision is presented based on the Littrow configuration. We mainly use right angle prisms accompanied with plane mirrors to make the measuring lights diffracted by the grating scale for many times. An optical subdivision factor of 1/24 can be obtained by this technique. A main difficulty of this technique is that the grating scale should be with high diffraction efficiency. Fortunately, the measuring light is incident on the grating scale at the Littrow angle, the grating scale can be designed with very high efficiency easily in this condition. Compared with traditional grating interferometers, this kind of grating interferometer can greatly increase the measuring resolution and accuracy, which could be widely used in nanometer-scale fabrications and measurements.
A novel method of displacement measurement based on a high density grating pair is proposed. When a laser beam is incident normal to a closely placed high density grating pair, efficiencies of transmission diffraction orders will change periodically along with the relative displacement of the two gratings in the grating period direction. The period of efficiency changing is equal to the grating period, thus measurement of displacement in the grating period direction can be achieved by detecting the power of diffraction orders.
Large-sized gratings are essential optical elements in laser fusion and space astronomy facilities. Scanning beam interference lithography is an effective method to fabricate large-sized gratings. To minimize the nonlinear phase written into the photo-resist, the image grating must be measured to adjust the left and right beams to interfere at their waists. In this paper, we propose a new method to conduct wavefront metrology based on phase-stepping interferometry. Firstly, a transmission grating is used to combine the two beams to form an interferogram which is recorded by a charge coupled device(CCD). Phase steps are introduced by moving the grating with a linear stage monitored by a laser interferometer. A series of interferograms are recorded as the displacement is measured by the laser interferometer. Secondly, to eliminate the tilt and piston error during the phase stepping, the iterative least square phase shift method is implemented to obtain the wrapped phase. Thirdly, we use the discrete cosine transform least square method to unwrap the phase map. Experiment results indicate that the measured wavefront has a nonlinear phase around 0.05 λ@404.7nm. Finally, as the image grating is acquired, we simulate the print-error written into the photo-resist.
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