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Dr. Chieh-Han Wu
at Taiwan Semiconductor Manufacturing Company
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Publications (1)
Proceedings Article | 13 March 2018 Paper
Directed Self-Assembly (DSA) for contact applications
Ming-Hui Weng, Tsung-Han Ko, Chih-Jie Lee, Han-Ping Shen, Chieh-Han Wu, Ken-Hsien Hsieh, Yuan-Chien Huang, Cheng-Han Wu, Chung-Ju Lee, Ching-Yu Chang, Chin-Hsiang Lin
Proceedings Volume 10586, 105861D (2018) https://doi.org/10.1117/12.2303492
KEYWORDS: Directed self assembly, Polymethylmethacrylate, Picosecond phenomena, Etching, Scanning electron microscopy, Oxides, Optical lithography, Double patterning technology, Bridges, Polymers
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