To develop diverse anisotropic thin films, asymmetric bideposition technique is introduced to
fabricate tilt columnar Ta2O5 films with biaxial optical property. The asymmetric bideposition is
achieved using two different opposite deposition angles (a+,a-) and two different thicknesses of
opposite deposited subdeposits. The two sets of Ta2O5 columnar thin films associated with deposited
subdeposits (d+,d-)=(5.2,2.8) are prepared at the opposite deposition angles (a+,a-)=(70,-40), (75,-40),
(80,-40) and at the opposite deposition angles (a+,a-)=(70,-50), (75,-50), (80,-50). Columnar thin films
with various column angle and biaxial properties are measured their planar birefringence and three
principal indexes. The larger column angle leads to higher principal indices. It is demonstrated that the
asymmetric bideposition can enhance the birefringence of a tilted columnar thin film.ntut.edu.tw
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