In this work, a novel tunable diaphragm structures are designed as sensing diaphragms for ultrasonic sensors. The natural frequency and sensitivity of the new structure diaphragms is simulated by finite element method. The proposed membrane structures is outer-ring clover (ORC) structure. Typically, an increase in membrane sensitivity is accompanied by a decrease in its natural frequency. However, this can be significantly mitigated by the proposed structures, which can exhibit notable structural optimization effects by simultaneously enhancing sensitivity and minimizing the reduction of the natural frequency. The simulation results indicate that, when the outer diameter and thickness remain unchanged, the sensor can achieve a maximum sensitivity improvement of 3.5 times and a reduction of 1.25 times in the natural frequency compared to the circular diaphragms (CD). Furthermore, ORC can be fabricated by micro-electromechanical systems (MEMS) technology, making it feasible for practical manufacturing and production. The sensing membrane is expected to be applicable in detection fields such as ultrasound partial discharge and underwater acoustics.
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