Mr. Dehui Xu Profile

Dehui Xu

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Publications (2)

Proceedings Article | 8 September 2011 Paper

Uncooled IR sensor based on lateral polysilicon pn junction diode: initial results

De-hui Xu, Bin Xiong, Yue-lin Wang

Proceedings Volume 8191, 819113 (2011) https://doi.org/10.1117/12.900485

KEYWORDS: Diodes, Infrared sensors, Silicon, Infrared imaging, Sensors, Etching, Bolometers, 3D modeling, Infrared radiation, Image sensors

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Proceedings Article | 24 August 2009 Paper

Integrated thermoelectric infrared sensor with XeF2 etching

De-hui Xu, Bin Xiong, Yue-lin Wang, Mi-feng Liu

Proceedings Volume 7381, 73812M (2009) https://doi.org/10.1117/12.834699

KEYWORDS: Thermoelectric materials, Etching, Sensors, Infrared sensors, Micromachining, CMOS devices, Silicon, CMOS sensors, Infrared radiation, Transistors

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