Dr. Eliot Gann Profile

Dr. Eliot Gann

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Publications (1)

Proceedings Article | 22 February 2021 Presentation + Paper

Hybrid resist synthesis by ex-situ vapor-phase infiltration of metal oxides into conventional organic resists

Nikhil Tiwale, Ashwanth Subramanian, Guillaume Freychet, Eliot Gann, Kim Kisslinger, Ming Lu, Aaron Stein, Jiyoung Kim, Chang-Yong Nam

Proceedings Volume 11612, 116120A (2021) https://doi.org/10.1117/12.2583908

KEYWORDS: Etching, Oxides, Metals, Extreme ultraviolet, Resistance, Optical lithography, Silicon, Scanning transmission electron microscopy, Plasma etching, Nanolithography

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