Dr. Eric Bakker
at ASML Netherlands BV
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 10 April 2024 Presentation
Will Conley, Stephen Hsu, Michael Crouse, Dylan Martin, Rajasekhar Rao, Natalllia Karlitskaya, Dirk van Leuken, Jan Baselmans, Marieke van Veen, Edwin de Jong, Birgitt Hepp, Rasmus Nielsen, Eric Bakker
Proceedings Volume PC12953, PC129530D (2024) https://doi.org/10.1117/12.3010892
KEYWORDS: Speckle, Pulsed laser operation, Line width roughness, Semiconducting wafers, Laser scanners, Simulations, Red lasers, Modulation, Edge roughness, Data processing

Proceedings Article | 13 June 2017 Paper
Arie den Boef, Hugo Cramer, Stefan Petra, Bastiaan Onne Fagginger Auer, Jolanda Schmetz-Schagen, Armand Koolen, Olaf van Loon, Gudrun de Gersem, Pieter Klandermans, Eric Bakker
Proceedings Volume 10449, 1044916 (2017) https://doi.org/10.1117/12.2270595
KEYWORDS: Scatterometry, Metrology, Semiconducting wafers, Semiconductors, Overlay metrology, Critical dimension metrology, Process control, Semiconductor manufacturing, Manufacturing, Lithography

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