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Fanwenqing Zeng
at Guangdong Univ of Technology
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Publications (1)
Proceedings Article | 28 April 2023 Poster + Paper
Lithography hotspot detection based on residual network
Proceedings Volume 12495, 124951M (2023) https://doi.org/10.1117/12.2657644
KEYWORDS: Education and training, Data modeling, Lithography, Performance modeling, Machine learning, Feature extraction, Statistical modeling, Overfitting, Deep learning, Very large scale integration
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