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Dr. Fei Liu
SPIE Involvement:
Author
Area of Expertise:
Laser physics , Plasma physics , Optics
Profile Summary
Fei Liu received his Ph.D. from University of California-Davis in 2013. His PhD research is on design and development of 100MW peak power TEA CO2 lasers. Afterwards he joined ASML research department working on feasibility study of alternative architecture of Laser Produced Plasma (LPP) EUV source. His current research interest is high-NA EUV machine integral system performance optimization. He received Richard Snavely Memorial Award in 2009.
Publications (4)
Proceedings Article | 16 October 2020 Presentation + Paper
Experimental verification of high-NA imaging simulations using SHARP
Natalia Davydova, Fei Liu, Markus Benk, Eelco van Setten, Gerardo Bottiglieri, Anton van Oosten, John McNamara, Vincent Wiaux, Joern-Holger Franke, Kenneth Goldberg, DS Nam, Joseph Zekry, Patrick Naulleau, Timon Fliervoet, Rene Carpaij
Proceedings Volume 11517, 1151714 (2020) https://doi.org/10.1117/12.2572846
KEYWORDS: Scanners, Photomasks, Extreme ultraviolet lithography, Optical lithography, Reticles, Extreme ultraviolet, Microscopes, Light sources, Fiber optic illuminators, Projection systems
SPIE Journal Paper | 22 September 2020
High-power EUV lithography: spectral purity and imaging performance
JM3, Vol. 19, Issue 03, 033801, (September 2020) https://doi.org/10.1117/12.10.1117/1.JMM.19.3.033801
Proceedings Article | 23 March 2020 Paper
Spectral purity performance of high-power EUV systems
Mark van de Kerkhof, Fei Liu, Marieke Meeuwissen, Xueqing Zhang, Robert de Kruif, Natalia Davydova, Guido Schiffelers, Felix Wählisch, Eelco van Setten, Wouter Varenkamp, Kees Ricken, Laurens de Winter, John McNamara, Muharrem Bayraktar
Proceedings Volume 11323, 1132321 (2020) https://doi.org/10.1117/12.2551021
KEYWORDS: Extreme ultraviolet, Deep ultraviolet, Extreme ultraviolet lithography, Reflectivity, Reticles, Imaging systems, Scanners
SPIE Journal Paper | 22 April 2013
Experimental research of a multipass transverse excitation atmospheric-pressure CO2 laser
Fei Liu, Johannes Rothe, Robert Horton, Alain Semet, Russell Evans, David Hwang
OE, Vol. 52, Issue 04, 049701, (April 2013) https://doi.org/10.1117/12.10.1117/1.OE.52.4.049701
KEYWORDS: Gas lasers, Carbon monoxide, Pulsed laser operation, Optical simulations, Laser resonators, Laser applications, Output couplers, Atmospheric optics, Solar energy, Reflectivity
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