Mr. Feng Xu Profile

Feng Xu

at Institute of Optics and Electronics CAS

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Author

Publications (3)

Proceedings Article | 15 October 2012 Paper

Technology of focus detection for 193nm projection lithographic tool

Chengliang Di, Wei Yan, Song Hu, Feng Xu, Jinglong Li

Proceedings Volume 8418, 84180Y (2012) https://doi.org/10.1117/12.971448

KEYWORDS: Modulation, Semiconducting wafers, Image processing, Image filtering, Photoelasticity, Signal detection, Lithography, Polarization, Wafer-level optics, Projection lithography

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SPIE Journal Paper | 1 August 2011

Fringe pattern analysis for optical alignment in nanolithography using two-dimentional Fourier transform

Feng Xu, Hu Song, Shaolin Zhou

OE, Vol. 50, Issue 08, 088001, (August 2011) https://doi.org/10.1117/12.10.1117/1.3609007

KEYWORDS: Fringe analysis, Fourier transforms, Optical alignment, Semiconducting wafers, Photomasks, Nanolithography, Linear filtering, Error analysis, Lithography, Numerical simulations

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Proceedings Article | 22 October 2010 Paper

Phase demodulation method for fringe pattern in alignment of nanometer lithography

Feng Xu, Song Hu, Zhengquan Luo

Proceedings Volume 7657, 76571B (2010) https://doi.org/10.1117/12.866811

KEYWORDS: Fringe analysis, Fourier transforms, Demodulation, Optical alignment, Phase shift keying, Nanolithography, Lithography, Photomasks, Semiconducting wafers, Wavelets

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