Using fly’s eye homogenizer has proven applicability in various fields, ranging from early-stage microscopy to state-of- the-art lithography. Hereby periodic lens arrays are commonly used to form a homogenous top -hat distribution. In turn, this periodicity can limit the attainable homogeneity by interference based micro - inhomogeneities. Furthermore, the positioning of the lens arrays results in small spot sizes directly at the lens surface, compromising functionality for large pulse energies. Here we present the challenges emerging due to the usage of non-periodic lens-arrays and introduce our design concept, suppressing interference based micro-inhomogeneities while being suitable for applications with large pulse energies.
Beam-shaping of homogeneous line profiles at ultra-violet wavelengths has wide applicability in the flat-panel display industry. Besides the well-established Excimer-Laser-based setups, diode-pumped-solid-state lasers with high repetition rates and comparatively small pulse energies have proven to be capable of providing a cost-effective alternative for different process steps e.g. Laser-Lift-Off or Solid-State-Laser-Annealing. We give a short summary about challenges emerging during the design of these system and demonstrate the generation of state-of-the-art laser-lines, offering a super-Gaussian, top-hat-shaped short-axis profile..
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