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Gou Kawaguchi
at Micron Technology, Inc.
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Publications (1)
Proceedings Article | 26 May 2022 Poster + Paper
An in-depth look at comprehensive and efficient methodology for CD uniformity budget breakdown
Ulrich Denker, Philip Gröger, Xaver Thrun, Stefan Buhl, Mycahya Eggleston, Nhi Doan, Gou Kawaguchi, Ranjan Khurana
Proceedings Volume 12053, 120531V (2022) https://doi.org/10.1117/12.2613709
KEYWORDS: Critical dimension metrology, Statistical analysis, Lithography, Error analysis, Data corrections, Visualization, Standards development, Scanners, Fluctuations and noise
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