A diffraction optical element (DOE) is designed to compensate the aberration induced by beam sampling grating (BSG),
for analyzing the uniformity of diffraction efficiency of BSG quickly and accurately. So it is suitable for a matrix CCD
to receive the aberration-free diffraction beam in the defocusing position directly. The DOE with the same size of the
BSG is placed closly to the BSG, and the fringes of the DOE can be obtained by computer generated hologram based on
holographic interference. Using genetic algorithm, the spatial frequency of the hologram is determined to meet the
process constraint of laser directly writing by changing parameters of the measurement path. The fringe distribution of
the hologram for laser direct writing can be calculated according to the iterative algorithm.
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