Dr. Herman Nicolai
at ASML Netherlands BV
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 18 March 2019 Presentation
Proceedings Volume 10961, 109610J (2019) https://doi.org/10.1117/12.2515725
KEYWORDS: Critical dimension metrology, Light sources, Semiconducting wafers, Yield improvement, Deep ultraviolet, Scanners, Control systems, Source mask optimization

Proceedings Article | 20 April 2006 Paper
Proceedings Volume 6192, 61922H (2006) https://doi.org/10.1117/12.667237
KEYWORDS: Polymers, Light emitting diodes, Gold, Palladium, Bismuth, Electron transport, Organic light emitting diodes, Thin films, Excitons, Nitrogen

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