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Dr. Hyung Joo Lee
Sr. Staff Process Engineer at Lam Research
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Publications (3)
Proceedings Article | 10 April 2024 Poster + Paper
Advanced process control by machine learning-based virtual metrology for high product mix manufacturing
Proceedings Volume 12955, 1295526 (2024) https://doi.org/10.1117/12.3009796
KEYWORDS: Advanced process control, Vacuum chambers, Chemical vapor deposition, Manufacturing, Control systems, Film thickness, Data modeling, Metrology, Simulations, Machine learning
Proceedings Article | 10 April 2024 Poster + Paper
Fast and accurate automatic wafer defect detection and classification using machine learning based SEM image analysis
Sanghyun Choi, Qian Xie, Nathan Greeneltch, Hyung Joo Lee, Mohan Govindaraj, Srividya Jayaram, Mark Pereira, Sayani Biswas, Samir Bhamidipati, Ilhami Torunoglu
Proceedings Volume 12955, 129553M (2024) https://doi.org/10.1117/12.3012184
KEYWORDS: Education and training, Scanning electron microscopy, Data modeling, Performance modeling, Defect detection, Machine learning, Object detection, Semiconducting wafers, Image analysis, Image quality
Proceedings Article | 27 April 2023 Paper
AI-guided reliability diagnosis for 5,7nm automotive process
Proceedings Volume 12496, 124963J (2023) https://doi.org/10.1117/12.2662880
KEYWORDS: Reliability, Semiconducting wafers, Data modeling, Manufacturing, Fabrication, Semiconductors, Industry, High volume manufacturing, Model-based design, Metrology
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