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Iga Malicka
at Technische Univ Graz
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Publications (1)
Proceedings Article | 31 May 2023 Presentation + Paper
Design optimization of silicon nitride-based micro-ring resonator systems in a CMOS mass production environment
Jakob Wilhelm Hinum-Wagner, Anton Buchberger, Christoph Schmidt, Christian Schörner, Desiree Rist, Samuel Marko Hoermann, Gandolf Feigl, Iga Malicka, Stephan Janka, Jochen Kraft, Alexander Bergmann
Proceedings Volume 12575, 125750A (2023) https://doi.org/10.1117/12.2665322
KEYWORDS: Semiconducting wafers, Waveguides, Silicon, Resonators, Design and modelling, Fabrication, Simulations, Plasma enhanced chemical vapor deposition, Microrings, Low pressure chemical vapor deposition
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