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Jaehee Lee
at Nikon Precision Korea Ltd
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Publications (1)
Proceedings Article | 27 April 2023 Poster + Paper
Absolute alignment measurement of underlayer and overlayer of diffraction-based overlay mark by image-based alignment metrology system
Jaeil Lee, Iksun Park, Youngjin Park, Jonghyun Hwang, Hyeonjun Ha, Jaewoong Sohn, Jaehee Lee, Jinseok Moon, Yuki Kondo, Satoshi Ando
Proceedings Volume 12496, 124962F (2023) https://doi.org/10.1117/12.2657656
KEYWORDS: Overlay metrology, Optical alignment, Metrology
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