Dr. Jared Schwartz Profile

Dr. Jared Schwartz

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Publications (1)

Proceedings Article | 9 April 2024 Presentation + Paper

Positive-tone, dry-develop poly(aldehyde) photoresist

Jose Lopez Ninantay, Anthony Engler, Jared Schwartz, Paul Kohl

Proceedings Volume 12957, 129570G (2024) https://doi.org/10.1117/12.3010169

KEYWORDS: Photoacid generators, Polymers, Photoresist materials, Lithography, Photoresist developing, Line edge roughness, Film thickness, Plasma, Ultraviolet radiation

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