We present a fabrication method for 3D microtransformers with air core inside silica glass by means of femtosecond-laser-wet-etching (FLWE) and metal-microsolidifying, for very high frequency applications. A fabricated transformer with 24turns of primary coil and 12 turns of secondary coil,yielded an inductance of 70nH and 55nH. The maximum transformer efficiency of 62% was measured at a load of 50 Ω. Finally, the embedded 3D micro-transformer can be easily integrated with other microelectrical, mechanical and optical systems, applying in MEMS, sensors and lab-on-chips.
Microfluidic chips and microreactors have been widely used in various fields due to their low reagent consumption, fast reaction speed and good safety. Besides, temperature is the key parameter of many biochemical reactions. So it is important for the creation of temperature controllable micro-reactor. However, There are some problems in existing micro-reactors, such as structure, size, temperature control method and temperature distribution. Here we report a method based on an improved femtosecond laser wet etching technology and metal-microsolidifying process for the fabrication of microchannel and 3D microcoils inside fused silica. Based on this approach, we fabricate a temperature controllable micro-reactor used for polymerase chain reaction (PCR) by integrating 3D metallic microcoils and microfluidic channel twined by microcoils inside fused silica. We precisely and conveniently get required temperature by varying the voltage of microcoils. The micro-reactor also exhibits a high integration level and good uniformity of temperature distribution. In addition, we get a miniaturized device which can be conveniently integrated.
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