Mr. Joerg Paufler Profile

Joerg Paufler

at GLOBALFOUNDRIES

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Publications (2)

Proceedings Article | 20 November 2024 Poster + Paper

Application of KrF PSM in ArF photolithography processing

Sierra Shapiro, Sia Kim Tan, Jae Yeol Maeng, Christopher Magg, Joerg Paufler, Nathan Neal

Proceedings Volume 13216, 132162J (2024) https://doi.org/10.1117/12.3034703

KEYWORDS: Photomasks, Semiconducting wafers, Optical proximity correction, Simulations, Optical lithography, Phase shifts

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Proceedings Article | 30 April 2023 Presentation

Challenges in advanced 300mm silicon photonics technology

Massud Aminpur, Erik Geiss, Vijayalakshmi Seshashalam, Brendan O'Brien, Jean Raymod Fakhoury, Joerg Paufler, San Leong Liew, Ken Shea, Keith Donegan, Ryan Sporer, Wenhe Lin

Proceedings Volume PC12499, PC124990A (2023) https://doi.org/10.1117/12.2658702

KEYWORDS: Silicon photonics, Waveguides, Semiconductor lasers, Quantum computing, Modulators, Manufacturing, Germanium, Diodes, Data centers

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