Dr. Jonathan L. P. Barreaux Profile

Dr. Jonathan L. P. Barreaux

PhD Candidate at Univ Twente

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Proceedings Article | 17 April 2014 Paper

Spectral purity enhancement for the EUV lithography systems by suppressing UV reflection from multilayers

Qiushi Huang, Meint de Boer, Jonathan Barreaux, Daniel Paardekooper, Toine van den Boogaard, Robbert van de Kruijs, Erwin Zoethout, Eric Louis, Fred Bijkerk

Proceedings Volume 9048, 90480G (2014) https://doi.org/10.1117/12.2046415

KEYWORDS: Extreme ultraviolet, Ultraviolet radiation, Reflectivity, Silicon, Diffraction, Multilayers, Reflection, Extreme ultraviolet lithography, Plasma, Imaging systems

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