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Dr. Juan Ramos-Martos
at Ctr Nacional de Microelectrónica
SPIE Involvement:
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Publications (1)
Proceedings Article | 1 July 2005 Open Access Paper
SIGEM, low-temperature deposition of poly-SiGe MEMs structures on standard CMOS circuits
Juan Ramos-Martos, Joaquin Ceballos-Caceres, Antonio Ragel-Morales, Jose Miguel Mora-Gutierrez, Alberto Arias-Drake, Miguel Angel Lagos-Florido, Jose Maria Munoz-Hinojosa, Anshu Mehta, Agnes Verbist, Bert du Bois, Kersten Kehr, Christina Leinenbach, Steven Van Aerde, Jorg Spengler, Ann Witvrouw
Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.608499
KEYWORDS: Amplifiers, Signal to noise ratio, Sensors, Signal detection, Modulators, Microelectromechanical systems, Digital signal processing, Electrodes, Resonators, Semiconducting wafers
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