Dr. Junwon Han Profile

Dr. Junwon Han

at IBM Research - Albany

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Author

Publications (3)

Proceedings Article | 16 April 2024 Presentation + Paper

Large feature wafer level in-line optical metrology techniques for advanced packaging schemes

Katherine Sieg, Christopher Bottoms, Christopher Waskiewicz, Alejandro Matos Mejia, Junwon Han, Shahid Butt, Daniel Schmidt, Stefan Schoeche, Alexander Hamer, Alex Hubbard

Proceedings Volume 12955, 129551P (2024) https://doi.org/10.1117/12.3012149

KEYWORDS: Semiconducting wafers, Interferometry, Wafer bonding, Metrology

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Proceedings Article | 10 April 2024 Presentation

Controlling patterning uniformity in thick resist lithography

Christopher Bottoms, Alexander Hamer, Alejandro Mejia, Alex Hubbard, Nicholas Latham, Katherine Sieg, Jennifer Fullam, Vinay Pai, Junwon Han, Juan-Manuel Gomez, Christopher Waskiewicz, Shahid Butt

Proceedings Volume PC12956, PC129560E (2024) https://doi.org/10.1117/12.3012541

KEYWORDS: Optical lithography, Lithography, Coating thickness, Semiconducting wafers, Plating, Photoresist processing, Dielectrics, Coating

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Proceedings Article | 10 April 2024 Presentation + Paper

Spectral interferometry for TSV metrology in chiplet technology

Stefan Schoeche, Daniel Schmidt, Junwon Han, Shahid Butt, Katherine Sieg, Marjorie Cheng, Aron Cepler, Shaked Dror, Jacob Ofek, Ilya Osherov, Igor Turovets

Proceedings Volume 12955, 129551O (2024) https://doi.org/10.1117/12.3011748

KEYWORDS: Semiconducting wafers, Wafer level optics, Metrology, Silicon, Reactive ion etching, Reflection, Interferometry, Dielectrics, Polarization, Semiconductor manufacturing

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