Dr. Kalaivanan Loganathan Profile

Dr. Kalaivanan Loganathan

at King Abdullah Univ of Science and Technology

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Publications (2)

Proceedings Article | 13 June 2022 Presentation

Nanoscale soft-stamp and nanofluidic channel fabrication using nanogap metal electrodes made via adhesion lithography

Kalaivanan Loganathan, Ulrich Butner, Florencio Pisig , Ahad Syed, Dipti Naphade, Hendrik Faber, Emre Yengel, Thomas Anthopoulos

Proceedings Volume PC12054, PC120540N (2022) https://doi.org/10.1117/12.2613455

KEYWORDS: Electrodes, Metals, Nanolithography, Lithography, Silicon, Photomasks, Manufacturing, Luminescence, Extreme ultraviolet lithography, Etching

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Proceedings Article | 24 March 2020 Presentation

Self-forming nanogap diodes operate beyond 10 GHz enabled via adhesion lithography (Conference Presentation)

Kalaivanan Loganathan, Emre Yengel, Hendrik Faber, Akmaral Seitkhan, Emre Yarali, Begimai Adilbekova, Shuai Yang, Weiwei Li, Azamat Bakytbekov, Atif Shamim, Thomas Anthopoulos

Proceedings Volume 11324, 1132413 (2020) https://doi.org/10.1117/12.2562189

KEYWORDS: Diodes, Lithography, Electron beam lithography, Electrodes, Metals, Manufacturing, Sensors, Annealing, Internet, Medicine

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