Dr. Karen H. Brown Profile

Dr. Karen H. Brown

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Publications (7)

Proceedings Article | 20 May 2004 Open Access

In the end it's the bottom line that counts

Karen Brown

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.546202

KEYWORDS: Photomasks, Semiconductors, Manufacturing, Semiconducting wafers, Lithography, Electronics, Semiconductor manufacturing, Extreme ultraviolet, Optical lithography, Equipment and services

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Proceedings Article | 20 May 2004 Paper

Predicting image placement accuracy of x-ray masks

Gerald Dicks, Roxann Engelstad, Edward Lovell, Brent Boerger, Daniel Fleming, Karen Brown

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.546200

KEYWORDS: Photomasks, Semiconducting wafers, Image processing, Silicon carbide, X-rays, 3D modeling, Silicon, Etching, X-ray lithography, Chromium

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Proceedings Article | 9 June 1995 Paper

SEMATECH and the national technology roadmap: needs and challenges

Karen Brown

Proceedings Volume 2438, (1995) https://doi.org/10.1117/12.210343

KEYWORDS: Lithography, Manufacturing, Photomasks, Optics manufacturing, Semiconductors, Etching, Semiconducting wafers, Overlay metrology, X-rays, Semiconductor manufacturing

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Proceedings Article | 26 May 1995 Paper

SEMATECH and the national technology roadmap: needs and challenges

Karen Brown

Proceedings Volume 2440, (1995) https://doi.org/10.1117/12.209246

KEYWORDS: Lithography, Manufacturing, Photomasks, Optics manufacturing, Semiconductors, Etching, Semiconducting wafers, Overlay metrology, Semiconductor manufacturing, Deep ultraviolet

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Proceedings Article | 22 May 1995 Paper

SEMATECH and the national technology roadmap: needs and challenges

Karen Brown

Proceedings Volume 2439, (1995) https://doi.org/10.1117/12.209197

KEYWORDS: Lithography, Manufacturing, Photomasks, Semiconductors, Optics manufacturing, Etching, Semiconducting wafers, Overlay metrology, Deep ultraviolet, X-rays

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Proceedings Article | 19 May 1995 Paper

SEMATECH and the national technology roadmap: needs and challenges

Karen Brown

Proceedings Volume 2437, (1995) https://doi.org/10.1117/12.209153

KEYWORDS: Lithography, Manufacturing, Photomasks, Optics manufacturing, Semiconductors, Etching, Semiconducting wafers, Overlay metrology, Semiconductor manufacturing, Deep ultraviolet

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Proceedings Article | 7 December 1994 Paper

National lithography roadmap: wafer requirements in the year 2000

Karen Brown

Proceedings Volume 2322, (1994) https://doi.org/10.1117/12.195838

KEYWORDS: Photomasks, Semiconducting wafers, Lithography, Overlay metrology, Manufacturing, X-rays, Optics manufacturing, Photomask technology, Silicon, Etching

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Showing 5 of 7 publications

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