Prof. Klaus Hasche Profile

Prof. Klaus Hasche

at Physikalisch-Technische Bundesanstalt

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Publications (2)

Proceedings Article | 20 November 2003 Paper

Metrological characterization of nanometer film thickness standards for XRR and ellipsometry applications

Klaus Hasche, Peter Thomsen-Schmidt, Michael Krumrey, George Ade, Gerhard Ulm, Juergen Stuempel, Stefan Schaedlich, Wilfried Frank, Mathias Procop, Uwe Beck

Proceedings Volume 5190, (2003) https://doi.org/10.1117/12.512216

KEYWORDS: Atomic force microscopy, Nickel, Calibration, Metrology, Standards development, Transmission electron microscopy, Ellipsometry, Platinum, X-rays, Manufacturing

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Proceedings Article | 11 September 2001 Paper

Traceable measurement results from scanning probe microscopes by laser interferometry

K. Hasche, Konrad Herrmann, R. Seemann, Hans-Joachim Buechner

Proceedings Volume 4420, (2001) https://doi.org/10.1117/12.439210

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