Konrad Rössler
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 16 September 2022 Paper
Markus Greul, Holger Sailer, Matthias Wahl, John Duff, Jeff Michelmann, Richard Bojko, Dmitri Titko, Konrad Rössler, Nezih Ünal
Proceedings Volume 12325, 123250P (2022) https://doi.org/10.1117/12.2640799
KEYWORDS: Photomasks, Photonic devices, Manufacturing, Calibration, Line edge roughness, Lithography, Waveguides, Photonics

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