CONFERENCE PROCEEDINGS
Advanced Search
Kurt Gielissen
at Technische Univ Eindhoven
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 18 March 2009 Paper
Grid spectral purity filters for suppression of infrared radiation in laser-produced plasma EUV sources
Wouter Soer, Martin Jak, Andrei Yakunin, Maarten van Herpen, Vadim Banine
Proceedings Volume 7271, 72712Y (2009) https://doi.org/10.1117/12.814231
KEYWORDS: Transmittance, Extreme ultraviolet, Infrared radiation, Optical filters, Extreme ultraviolet lithography, Plasma, Silicon, Reflectivity, Carbon dioxide lasers, Infrared spectroscopy
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top