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Liming Zhang
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Publications (1)
Proceedings Article | 10 April 2024 Poster + Paper
Hotspot discovery and variability analysis for advanced EUV processes
Kaushik Sah, Zhijin Chen, Yao Zhang, Liming Zhang, Cao Zhang, Craig Higgins, Anatoly Burov, Guy Parsey, Pradeep Vukkadala, Roel Gronheid, Arpit Jain, Ramakanth Ramini, Ankur Agrawal, Garima Sharma, Andrew Cross, Syamashree Roy, Victor Blanco
Proceedings Volume 12955, 129553H (2024) https://doi.org/10.1117/12.3011178
KEYWORDS: Stochastic processes, Scanning electron microscopy, Design, Semiconducting wafers, Inspection, Metrology, Extreme ultraviolet lithography, Defect inspection
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