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Luxuan Cai
at Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF
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Publications (2)
Proceedings Article | 26 August 2024 Presentation
Metallic freeform optics for the cold optic instrument of MICADO (Conference Presentation)
Jan Kinast, Markus Unger, Sandra Müller, Mathias Rohde, Benjamin Quaiser, Robert Jende, Peter Weide, Knut Kleinbauer, Ralf Steinkopf, Tatjana Porwol, Luxuan Cai, Jonas Tabbert, Corona Schmalian, Antonia Clara Klein, Svetlana Shestaeva, Stefan Schwinde, Johannes Hartung, Thomas Peschel, Andreas Gebhardt, Stefan Risse
Proceedings Volume 13100, 1310009 (2024) https://doi.org/10.1117/12.3019918
Proceedings Article | 10 April 2024 Poster + Paper
Super-polished metallic freeform optics for EUV-application
Tatjana Porwol, Jan Kinast, Luxuan Cai, Ralf Steinkopf, Stefan Risse
Proceedings Volume 12953, 1295318 (2024) https://doi.org/10.1117/12.3010784
KEYWORDS: Chemical mechanical planarization, Optical surfaces, Freeform optics, Surface finishing, Manufacturing, Optics manufacturing, Metal optics, Magnetorheological finishing, Atomic force microscopy, Polishing, EUV optics
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