Dr. Marek Wzorek Profile

Dr. Marek Wzorek

at Institute of Microelectronics and Photonics

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Author

Publications (3)

Proceedings Article | 21 March 2023 Presentation

Optimization of low resistivity Ti/Al/TiN/Au ohmic contacts to buffer-free AlGaN/GaN high electron mobility transistor structures

Maciej Kaminski, Oskar Sadowski, Andrzej Taube, Marek Ekielski, Jarosław Tarenko, Magdalena Zadura, Marek Wzorek, Anna Szerling

Proceedings Volume PC12421, (2023) https://doi.org/10.1117/12.2648930

KEYWORDS: Transistors, Annealing, Field effect transistors, Metals, Resistance, Gallium nitride, Transmission electron microscopy, Tin, Scanning electron microscopy, Microwave radiation

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SPIE Journal Paper | 25 April 2017

Al_0.45Ga_0.55As/GaAs-based single-mode distributed-feedback quantum-cascade lasers with surface gratings

Anna Szerling, Renata Kruszka, Kamil Kosiel, Marek Wzorek, Krystyna Gołaszewska, Artur Trajnerowicz, Piotr Karbownik, Maciej Kuc, Tomasz Czyszanowski, Michał Walczakowski, Norbert Pałka

JNP, Vol. 11, Issue 02, 026004, (April 2017) https://doi.org/10.1117/12.10.1117/1.JNP.11.026004

KEYWORDS: Quantum cascade lasers, Gallium arsenide, Etching, Gallium, Reactive ion etching, Aluminum, Argon, Fiber Bragg gratings, Photoresist materials, Waveguides

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Proceedings Article | 20 February 2017 Presentation + Paper

Al0.45Ga0.55As/GaAs-based single-mode distributed-feedback quantum-cascade lasers with surface gratings

Anna Szerling, Renata Kruszka, Kamil Kosiel, Marek Wzorek, Krystyna Gołaszewska, Artur Trajnerowicz, Piotr Karbownik, Maciej Kuc, Tomasz Czyszanowski, Michał Walczakowski, Norbert Palka

Proceedings Volume 10123, 101231M (2017) https://doi.org/10.1117/12.2252791

KEYWORDS: Quantum cascade lasers, Waveguides, Gold, Plasma etching, Mid-IR, Cladding, Waveguide lasers, Deep ultraviolet, Optical lithography, Etching, Gallium arsenide, Reactive ion etching, Fiber Bragg gratings, Silicon, Photoresist materials, Argon

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