Masanobu Inada
at Sony Global Manufacturing & Operations Corp.
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 3 October 2022 Presentation + Paper
Toshifumi Yasui, Hiroyuki Tahara, Yusuke Kono, Kohei Yamamoto, Tetsuaki Iwane, Yoshiki Kashihara, Masanobu Inada
Proceedings Volume 12218, 1221804 (2022) https://doi.org/10.1117/12.2627743
KEYWORDS: Manufacturing, Collimation, Computer simulations, Reconstruction algorithms, Beam shaping, Grayscale lithography, Transmittance, Refractive index, Algorithm development, Nickel

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