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Mayank Baghoria
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Publications (1)
Proceedings Article | 27 August 2024 Poster + Paper
Design and commissioning of a UHV sputter system for the fabrication of superconducting TiN KIDs using high power impulse magnetron sputtering
C. Woodhead, M. Tapia, C. Dunscombe, T. Brien, M. Baghoria, S. Doyle, P. Hargrave
Proceedings Volume PC13102, PC1310213 (2024) https://doi.org/10.1117/12.3019852
KEYWORDS: Semiconducting wafers, Tin, Head, Superconductors, Sputter deposition, Technetium, Nitrogen, Magnetrons, Film thickness, Plasma
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