Mr. Mayur Suri Profile

Mayur Suri

at KLA-Tencor France

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Author

Publications (2)

SPIE Journal Paper | 20 August 2013

Defect source analysis of directed self-assembly process

Paulina Delgadillo, Mayur Suri, Stephane Durant, Andrew Cross, Venkat Nagaswami, Dieter Van den Heuvel, Roel Gronheid, Paul Nealey

JM3, Vol. 12, Issue 03, 031112, (August 2013) https://doi.org/10.1117/12.10.1117/1.JMM.12.3.031112

KEYWORDS: Inspection, Etching, Semiconducting wafers, Critical dimension metrology, Particles, Chemical analysis, Scanning electron microscopy, Polymethylmethacrylate, Signal processing, Directed self assembly

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Proceedings Article | 26 March 2013 Paper

Defect source analysis of directed self-assembly process (DSA of DSA)

Paulina Rincon Delgadillo, Ryota Harukawa, Mayur Suri, Stephane Durant, Andrew Cross, Venkat Nagaswami, Dieter Van Den Heuvel, Roel Gronheid, Paul Nealey

Proceedings Volume 8680, 86800L (2013) https://doi.org/10.1117/12.2011674

KEYWORDS: Semiconducting wafers, Etching, Inspection, Critical dimension metrology, Particles, Scanning electron microscopy, Plasma etching, Polymethylmethacrylate, Thin film coatings, Directed self assembly

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