Mr. Michael B. Jacobsson Profile

Michael B. Jacobsson

at Univ of Texas at Austin

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Publications (2)

Proceedings Article | 4 April 2011 Paper

Reactive fluorinated surfactant for step and flash imprint lithography

Tsuyoshi Ogawa, Daniel Hellebusch, Michael Lin, B. Michael Jacobsson, William Bell, C. Grant Willson

Proceedings Volume 7970, 79700T (2011) https://doi.org/10.1117/12.871627

KEYWORDS: Fluorine, Silicon, Lithography, Head-mounted displays, Glasses, Optical lithography, Nanoimprint lithography, Interfaces, Information operations, Adhesives

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Proceedings Article | 3 April 2010 Paper

Planarizing material for reverse-tone step and flash imprint lithography

Tsuyoshi Ogawa, Satoshi Takei, B. Michael Jacobsson, Ryan Deschner, William Bell, Michael Lin, Yuji Hagiwara, Makoto Hanabata, C. Grant Willson

Proceedings Volume 7637, 763708 (2010) https://doi.org/10.1117/12.846430

KEYWORDS: Silicon, Ultraviolet radiation, Etching, Oxygen, Silicon carbide, Lithography, Scanning electron microscopy, Coating, Liquids, Epoxies

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