Mr. Ming Tian Profile

Ming Tian

at Shanghai Huali Microelectronics Corp

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 20 March 2019 Paper

Critical defect detection, monitoring and fix through process integration engineering by using D2DB pattern monitor solution

Ming Tian, Yu Zhang, Tiapeng Guan, Jianghua Leng, Baojun Zhao, Lei Yan, Wei Hua, Abhishek Vikram, Guojie Chen, Hui Wang, Gary Zhang, Wenkui Liao

Proceedings Volume 10962, 109620L (2019) https://doi.org/10.1117/12.2511672

KEYWORDS: Scanning electron microscopy, Semiconducting wafers, Optical lithography, Defect detection, Etching, Process control, Image processing, Process engineering, Wafer inspection, Chemical mechanical planarization

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years