Dr. Mingxing Chen Profile

Dr. Mingxing Chen

at Shanghai Institute of Optics and Fine Mechanics

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 31 March 2014 Paper

Illumination system without scanning slit for lithographic tools

Yunbo Zhang, Aijun Zeng, Ying Wang, Mingxing Chen, Shanhua Zhang, Qiao Yuan, Huijie Huang

Proceedings Volume 9052, 90522H (2014) https://doi.org/10.1117/12.2046303

KEYWORDS: Micromirrors, Lithographic illumination, Lithography, Mirrors, Photomasks, Microlens array, Control systems, 193nm lithography, Optical scanning systems, Optical simulations

Read Abstract +

Proceedings Article | 12 April 2013 Paper

Model of freeform illumination mode and polarization mode for 193nm immersion lithographic machine

Yunbo Zhang, Aijun Zeng, Ying Wang, Mingxing Chen, Huijie Huang

Proceedings Volume 8683, 868329 (2013) https://doi.org/10.1117/12.2011517

KEYWORDS: Polarization, Micromirrors, Wave plates, Lithography, Lithographic illumination, Microlens array, 193nm lithography, Optical components, Microlens, Diffractive optical elements

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years