Dr. Nunzio Buccheri
at imec
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 9 April 2024 Presentation + Paper
D. Montero, N. Buccheri, Q. Lin, S. Roy, S. Paolillo, C. Wu, Y. Hermans, S. Decoster, B. Baudemprez, J. Finoulst, F. Lazzarino, S. Park, Z. Tokei
Proceedings Volume 12958, 129580D (2024) https://doi.org/10.1117/12.3010454
KEYWORDS: Etching, Semiconducting wafers, Dielectrics, Critical dimension metrology, Printing, Lithography, Oxides, Plasma

Proceedings Article | 28 April 2023 Poster + Paper
Proceedings Volume 12494, 1249414 (2023) https://doi.org/10.1117/12.2657917
KEYWORDS: Optical lithography, Semiconducting wafers, Lithography, Back end of line, Resistance, Extreme ultraviolet lithography, Etching, Critical dimension metrology

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