The innovation of this paper is combining the micro-nano optical technology and the vacuum photoelectric imaging devices manufacturing. The multialkali photocathode deposition substrate is designed with a meta-surface structure by using the Finite-difference time-domain. According to the nanoimprinting and the atomic layer deposition, the structure of meta-surface can be obtained. Metasurface have the ability of simultaneously controlling the phase of the light by tailoring the geometry of microstructures. The negative loss in the direction of light wave propagation is suppressed, the reflection at the interface between the cathode and the deposited substrate is reduced, and the absorption coefficient of the cathode material to the incoming light is improved. And the absorption rate of the incident light can be increased by 20.5%. The atomic layer deposition is used to prepare the nanolaminate on the surface of the micro-structure. Based on the imaging tube with the meta-surface, the experiment results show that the average value of the quantum efficiency increased by 21.2% in the visible light range and increased by 10.3% in near infrared band respectively, which reaching the international advanced level. A new method is provided to improve the performance parameters of the vacuum photoelectric imaging devices and point the direction for the improvement of the imaging tube. As shown in this paper, the performance parameters of the vacuum photoelectric imaging devices still have great development potential by optimizing the structure of the meta-surface.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.