Dr. Ren-Jay Kou Profile

Dr. Ren-Jay Kou

at ASML Taiwan Ltd

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Publications (2)

Proceedings Article | 12 December 2009 Paper

Litho scenario solutions for FinFET SRAM 22nm node

Shih-En Tseng, Shun-Der Wu, Jacques Wang, Jay Kou, Orion Mouraille, Reiner Jungblut, Tsann-Bim Chiou, Jo Finders, Alek Chen, Mircea Dusa, Stephen Hsu

Proceedings Volume 7520, 752025 (2009) https://doi.org/10.1117/12.837495

KEYWORDS: Source mask optimization, Scanners, Photomasks, Reticles, Diffractive optical elements, Double patterning technology, Etching, Lithography, Error analysis

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Proceedings Article | 24 March 2009 Paper

Immersion scanner proximity matching using angle resolving scatterometry metrology

Ren-Jay Kou, Reiner Jungblut, Jan Hauschild, Shih-En Tseng, Jason Shieh, Jim Chen, Alek Chen, Koen Schreel

Proceedings Volume 7272, 727240 (2009) https://doi.org/10.1117/12.816455

KEYWORDS: Scatterometry, Scanners, Metrology, Semiconducting wafers, Optical proximity correction, Systems modeling, Reticles, Lithography, Time metrology, Scatter measurement

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