CONFERENCE PROCEEDINGS
Advanced Search
Renjin Shao
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 20 November 2012 Paper
A cost-effective method for fabricating antireflection structure using self-agglomerated metal nanoparticles as etching mask
Xiaoxuan Dong, Su Shen, Renjin Shao, Linsen Chen
Proceedings Volume 8564, 856427 (2012) https://doi.org/10.1117/12.999910
KEYWORDS: Silver, Nanoparticles, Etching, Metals, Antireflective coatings, Nanostructures, Silicon, Annealing, Reactive ion etching, Nanolithography
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top