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Richard Souil
at CEA
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Publications (1)
Proceedings Article | 12 April 2021 Presentation
NbN-on-Si superconducting nanowire single photon detectors: effect of a sputtered AlN buffer layer
Raouia Rhazi, Houssaine Machhadani, Catherine Bougerol, Stéphane Lequien, Guillaume Rodriguez, Richard Souil, Jean-Luc Thomassin, Nicolas Mollard, Eva Monroy, Ségolène Olivier, Jean-Michel Gerard
Proceedings Volume 11721, 117210G (2021) https://doi.org/10.1117/12.2587853
KEYWORDS: Superconductors, Single photon detectors, Nanowires, Aluminum nitride, Semiconducting wafers, Crystals, Thin films, Thin film deposition, Sputter deposition, Single photon
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